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发明名称
DEVICE FOR MEASURING INCLINATION OF ELEMENT FORMING SURFACE AND DEVICE FOR MEASURING FLATNESS OF ELEMENT FORMING SURFACE
摘要
申请公布号
JPH05322540(A)
申请公布日期
1993.12.07
申请号
JP19920127053
申请日期
1992.05.20
申请人
NEC CORP
发明人
AKIYAMA YUTAKA
分类号
G01B11/26;G01B11/30;(IPC1-7):G01B11/26
主分类号
G01B11/26
代理机构
代理人
主权项
地址
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