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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH05320890(A)
申请公布日期
1993.12.07
申请号
JP19920130901
申请日期
1992.05.22
申请人
FUJITSU LTD
发明人
TAKAGI MASAHIRO;FUKAZAWA FUMIO;WATANABE MAKOTO
分类号
C23C14/34;C23C14/54;C23C14/56;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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