发明名称 Epitaxial compositions
摘要 A method for manufacturing, by chemical depostion from the vapor phase, epitaxial composites comprising thin films of a Group III-V compound semiconductor such as gallium arsenide (GaAs) or gallium alluminum arsenide (GaAlAs) on single crystal silicon substrates.
申请公布号 US5268327(A) 申请公布日期 1993.12.07
申请号 US19920885515 申请日期 1992.05.19
申请人 ADVANCED ENERGY FUND LIMITED PARTNERSHIP 发明人 VERNON, STANLEY M.
分类号 H01L21/205;H01L29/267;H01L31/0304;H01L31/18;(IPC1-7):H01L21/20 主分类号 H01L21/205
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