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发明名称
Piezoelektrisches Schichtelement und Verfahren zur Herstellung.
摘要
申请公布号
DE68907228(T2)
申请公布日期
1993.12.02
申请号
DE19896007228T
申请日期
1989.01.28
申请人
XAAR LTD., CAMBRIDGE, GB
发明人
MICHAELIS, ALAN JOHN, CHICAGO ILLINOIS 60606-1265, US;PATON, ANTHONY DAVID, LONGSTANTON ST.MICHAEL CAMBRIDGE, GB
分类号
H01L41/22;H01L41/24;(IPC1-7):H01L41/22
主分类号
H01L41/22
代理机构
代理人
主权项
地址
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