| 摘要 |
PURPOSE:To prevent the infiltration of airflow from worker's area, hold super cleanness in stable and facilitate to carry articles into the area of devices by a method wherein a plurality of partitioning members are provided movably in parallel between the area of devices, which requires super cleanness in a room, and the area of paths, which requires high cleanness, while the partitioning members are formed with a plural stags of slit openings which are extending horizontally. CONSTITUTION:The space of a working chamber 30 is divided into the areas A, A for devices, being positioned above manufacturing devices 32, 32, and the area B of a passageway, located at the center of the working chamber 30 and workers 34 operate therein. A ceiling air discharging section 25 is formed at the center of the lower part of a ceiling board 23 while airflow supplying sections or air supplying chambers 26, 26 are provided neighboringly at both sides of the air discharging section 25 so as to pinch it. A plurality of front panels 37, 37,... or partitioning members, which divide the areas A, A of devices from the area B of the passageway, are provided in parallel so that the mutual side ends are superposed alternately below ventilating ports 36, 36. The front panel 37 is formed with a plural steps of slit type openings 38, 38,... which are extended horizontally on a transparent rectangular plate. |
