发明名称 Probe with contact portion including Au and Cu alloy
摘要 A probe to be electrically connected to an internal circuit of a semiconductor element, comprising a contact portion to be brought into pressure contact with an electrode formed on the semiconductor element, wherein the contact portion is made of an alloy consisting of Au, Cu, and an inevitable impurity. The contact resistance between the probe and electrode is low, and is maintained low in a stable manner even if the probe is repeatedly used.
申请公布号 US5266895(A) 申请公布日期 1993.11.30
申请号 US19910800001 申请日期 1991.11.29
申请人 TOKYO ELECTRON YAMANASHI LIMITED 发明人 YAMASHITA, SATORU
分类号 C22C5/02;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):G01R1/073;G01R31/02 主分类号 C22C5/02
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