发明名称 SEALING METHOD AND SEALING STRUCTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To connect a semiconductor device and a circuit substrate with good reliability by eliminating a thermal stress of setting contraction during thermosetting of sealing resin, a stress to a junction part due to swelling by damping of the sealing resin and a thermal stress to a junction part at a high temperature and a low temperature. CONSTITUTION:A sealing structure wherein volatile solvent is filled into a between a semiconductor device 1 which is packaged on a circuit substrate 2by facedown bonding and the circuit substrate 2, and a periphery thereof is sealed with insulating resin 7, a void 8 is provided by volatilizing the filled volatile solvent and a periphery of the semiconductor device 1 is sealed with the silicone resin 7 to hold the semiconductor device 1 to the circuit substrate 2.</p>
申请公布号 JPH05315397(A) 申请公布日期 1993.11.26
申请号 JP19920115079 申请日期 1992.05.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 BESSHO YOSHIHIRO
分类号 H01L21/56;H01L21/60;H01L23/29;H01L23/31;(IPC1-7):H01L21/60 主分类号 H01L21/56
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