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发明名称
FORMING METHOD OF OXIDE FILM TO COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS5354492(A)
申请公布日期
1978.05.17
申请号
JP19760129694
申请日期
1976.10.28
申请人
SONY CORP
发明人
MITA ARIO;IMAMURA NAOMI
分类号
H01L21/316;H01L21/31;H01S5/00
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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