| 摘要 |
PURPOSE:To reduce the size and cost of the inspecting device at the time of integrally constituting a defect inspecting section and defect display section for a mask film as the inspecting device. CONSTITUTION:This inspecting device has an inspection table 4 which is mounted with the mask film MF to be inspected and is moved in one direction, the defect inspecting section 6 which is moved in the direction orthogonal with the moving direction of this inspection table and detects the pattern defect of the mask film MF and the defect display section 7 which is moved in the direction parallel with the defect inspecting section 6 and displays the defect at the detected defect point (a label sticking section for sticking the label indicting the defect to the mask film MF). As a result, the driving mechanisms for the defect inspecting section 6 and the defect display section 7 in one direction are commonly used and the mechanisms are simplified. |
