| 摘要 |
PURPOSE:To reduce the influence of the thermal drift and to increase the capacity with high density by dividing a prove supporter plate into plural blocks and providing the driving means to these divided blocks respectively to drive and control the blocks independently with each other. CONSTITUTION:Six cantilevers 213 are formed on a block 202 together with six tunnel current detecting probes 106 provided on the upper part. The tunnel currents detected by the probes 106 are sent to a multiplexer circuit 108, and only the tunnel current signal of the block where the information is read out is selected and sent to a controller 113 through a wiring 216. Then the read-out information is confirmed. The SiIC production processes such as the photolithography, the anisotropy etching of the Si single crystal, etc., are applied to all production processes of those preceding component parts. Therefore the production accuracy and the producibility can be improved for a recording/reproducing device. |
