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经营范围
发明名称
PLASMA GENERATING DEVICE
摘要
申请公布号
JPH05315096(A)
申请公布日期
1993.11.26
申请号
JP19920143307
申请日期
1992.05.08
申请人
SUGAWARA MINORU;KOKUSAI ELECTRIC CO LTD
发明人
SUGAWARA MINORU;KUROKAWA HARUSHIGE
分类号
C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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