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发明名称
Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
摘要
申请公布号
DE3688860(T2)
申请公布日期
1993.11.25
申请号
DE19863688860T
申请日期
1986.05.27
申请人
RIKAGAKU KENKYUSHO, WAKO, SAITAMA, JP
发明人
HARA, TAMIO, KITANO NIIZA-SHI SAITAMA-KEN, JP;HAMAGAKI, MANABU, WAKO-SHI SAITAMA-KEN, JP;AOYAGI, YOSHINOBU FUJIMI HEIGHTS 10-1, IRUMA-GUN SAITAMA-KEN, JP;NAMBA, SUSUMU, SHINJYUKU-KU TOKYO, JP
分类号
H01J27/02;H01J27/20;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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