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发明名称
Doppelmikroskop zur Beobachtung von Positionsvorgaengen vorzugsweise in der Siliziumplanartechnologie
摘要
申请公布号
DE1572557(A1)
申请公布日期
1970.04.23
申请号
DE19671572557
申请日期
1967.10.19
申请人
ARBEITSSTELLE FUER MOLEKULARELEKTRONIK
发明人
WESTPHAL,DIPL.-PHYS.PETER
分类号
G02B21/00;G02B21/18
主分类号
G02B21/00
代理机构
代理人
主权项
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