UNMANNED CARRYING DEVICE FOR CLEAN ROOM

摘要

PURPOSE:To provide an unmanned carrying device which is capable of suppressing generation of the naturally oxidated film on the surface of a semi- conductor wafer or the like even when the carriage of the semiconductor wafers is forced to be stopped for a long time by the cause of the device or by the cause of any other loading or carrying device while the semiconductor wafer or the like being loaded. CONSTITUTION:In an unmanned carrying device which loads goods to be carried from an equipment on the ground side and travels to the destination, the carried goods are stored in a container 40 and carried, and the container is connected to an inert gas storing part (gaseous nitrogen cylinder) 50 in order to execute substitution of the inside atmosphere through a gas-supplying passage 53.