发明名称 OPTICAL LIQUID SURFACE DETECTING DEVICE
摘要 PURPOSE:To achieve chemical resistance and detect the liquid surface at multiple points with one light-transmissible waveguide path. CONSTITUTION:A plurality of notches 24 and 27 for detecting liquid surface are provided at the outer-periphery part of an optical fiber 19 which is laid out within a bath 9 which houses a liquid 16 to be measured with a specified spacing in the direction of waveguide. Light is applied from a light source 20 to the optical fiber 19 and the liquid surface can be detected by detecting the optical change state of the reflection light with a detector 21.
申请公布号 JPH05306951(A) 申请公布日期 1993.11.19
申请号 JP19920134347 申请日期 1992.04.28
申请人 TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK 发明人 KUBOTA TOMOAKI;ETO AKINOBU
分类号 G01F23/28;(IPC1-7):G01F23/28 主分类号 G01F23/28
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