发明名称 |
OPTICAL LIQUID SURFACE DETECTING DEVICE |
摘要 |
PURPOSE:To achieve chemical resistance and detect the liquid surface at multiple points with one light-transmissible waveguide path. CONSTITUTION:A plurality of notches 24 and 27 for detecting liquid surface are provided at the outer-periphery part of an optical fiber 19 which is laid out within a bath 9 which houses a liquid 16 to be measured with a specified spacing in the direction of waveguide. Light is applied from a light source 20 to the optical fiber 19 and the liquid surface can be detected by detecting the optical change state of the reflection light with a detector 21. |
申请公布号 |
JPH05306951(A) |
申请公布日期 |
1993.11.19 |
申请号 |
JP19920134347 |
申请日期 |
1992.04.28 |
申请人 |
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK |
发明人 |
KUBOTA TOMOAKI;ETO AKINOBU |
分类号 |
G01F23/28;(IPC1-7):G01F23/28 |
主分类号 |
G01F23/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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