Laser beam scanner.

摘要

It is advantageous to oscillate a beam on objects when a high power CO2 laser beam or a high power YAG laser beam is used to weld or anneal the objects. In order to let a laser beam scan, a device for reciprocating a lens or a device for rotating two mirrors synchronously has been proposed. These devices suffer from the difficulty of cooling. Prior devices are not applicable to a high power laser. A parallel laser beam (5) is first reflected by a parabolic mirror (2). Then a mirror (3) which can be swayed reciprocally by a galvanometer reflects the beam toward the objects (13). A water inlet (11) and an outlet are mounted on a rear surface of the swaying mirror (3). The cooling water is carried by coiled tubes. Excellent heat diffusion prevents the galvanometer from malfunction.