发明名称 Palladium welding of a semiconductor body
摘要 A method of bonding together two dissimilar planar bodies, one of which is a semiconductor. A film of palladium is deposited on one of the bodies. The two bodies are pressed together with moderate force with the palladium in between. The palladium chemically reacts with the semiconductor and, at least in the case of GaAs, dissolves the surface oxide and forms a crystalline palladium/semiconductor product topotaxial with the semiconductor.
申请公布号 US5262347(A) 申请公布日期 1993.11.16
申请号 US19910744983 申请日期 1991.08.14
申请人 BELL COMMUNICATIONS RESEARCH, INC. 发明人 SANDS, TIMOTHY D.
分类号 B23K20/00;B23K20/02;B23K35/32;H01L21/02;H01L21/20;(IPC1-7):H01C21/84 主分类号 B23K20/00
代理机构 代理人
主权项
地址