| 摘要 |
PURPOSE:To provide a bellows type compressing device provided with performance of high vacuum, high pressure and large capacity by arranging bellows respectively between a plurality of disks provided with a ventilating port, and restricting end parts of the bellows and the disks by a plurality of rings fitted into a cylinder. CONSTITUTION:When a piston 2 is pressed in downward through a rod 3 by a power means, each bellows 11 to 13, connected to disks 14, 15 by rings 21 to 23 in a peripheral edge part, is gradually deflected, and gas in internal chambers 70 to 72 is moved to a lower chamber via each ventilating hole 38, 48 to draw out the gas in the internal chamber 72 to the outside from a flow path 57. Gas in external chambers 75 to 77 is guided to a heat exchanger 85 respectively through circulating holes 81 to 83 and cooled. When the piston rod 3 reaches a lower limit, each bellows 13 to 11 is stored in a folded condition by respectively bringing a protrusion panel 47 into contact with a bottom part 54, protrusion panel 37 into contact with the disk 15 and a protrusion panel 28 into contact with the disk 14, in a cylinder 1. Successively at the time of resetting the piston 2 upward, gas is supplied to each internal chamber 72 to 70 via a flow path 56. |
