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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH05302166(A)
申请公布日期
1993.11.16
申请号
JP19920106996
申请日期
1992.04.24
申请人
NEC CORP
发明人
ASAHINA KAZUNORI
分类号
C23C14/35;H01L21/203;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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