| 摘要 |
PURPOSE:To obtain a reflection preventing film having durability against a cleaning liquid or disinfectant and suitable for an optical glass lense to be used for a medical apparatus, especially for an endoscope. CONSTITUTION:This chemical resistant reflection preventing film consists of five layers on a substrate. The first and third layers from the substrate side consist of ZrO2 films, Ta2O5 films, mixture films of ZrO2 and Ta2O5, or mixture films of ZrO2 and TiO2. The second and forth layers consist of MgF2 films, and the fifth layer as the outermost layer adjacent to air consists of an AlN film. The AlN film has 5-30nm optical film thickness. |
