An electrostatic motor for use as a power generating mechanism to be mounted on a micromachine includes a rotatable semiconductor substrate and a drive electrode disposed in proximity to the substrate. The semiconductor substrate is doped with a specified impurity element to form electromagnetic wave-static electric converters of p-n junction. When the motor is to be started, the converter in the vicinity of the electrode is irradiated with electromagnetic waves to set up an electric field between the opposed surfaces of the converter and the electrode to rotate the substrate by an electrostatic force due to the electric field.
