首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
METHOD AND APPARATUS FOR VACUUM PROCESSING
摘要
申请公布号
JPH05299381(A)
申请公布日期
1993.11.12
申请号
JP19920100942
申请日期
1992.04.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
MISHIMA YOSHIYUKI
分类号
C23F4/00;H01L21/027;H01L21/30;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
您可能感兴趣的专利
HIGH ENERGY PHOTONIC ARBITRARY WAVEFORM SOURCE
OPTICAL DISC HAVING FOCUS OFFSET AREA
SYSTEM FOR DETERMINING A COMMUNICATION PATH THROUGH A TRANSLATION DEVICE
DEVICE AND METHOD FOR COMPENSATION OF CORNEAL BIREFRINGENCE OF THE EYE
ANTINEOPLASTIC AGENTS TARGETED VIA GLUT TRANSPORTERS
DEVICE AND METHOD FOR ELECTRONICALLY DISPLAYING A TIME INFORMATION DISPLAY REPRESENTATION
Semiconductor assembly using dual-cure die attach adhesive
A NAVIGATION SIGN
Method and system for automatically tracking the rerouting of logical circuit data in a data network
CIRCUMFERENTIAL FULL THICKNESS RESECTIONING DEVICE
Device for optical checking of quality characteristics of solar cell has optical means for modification of diffusion characteristics of light used for identification of quality characteristics of solar cell
Übertragungsleistungsregelung für Mobilfunk
SCREW HAVING A KNURLED PORTION
Leuchte für eine Unterwasserkamera
Pumpenspender für Medien mit Produktzurücksaugvorrichtung
Fahrspurerfassungsvorrichtung
VORRICHTUNG ZUR INKUBATION VON WASSERTIEREN
Flat solid oxide fuel cell stack for operating a bipolar conductor structure has charged oxygen molecules and cathode/anode layers
Polymers having low levels of long chain branching and methods of making the same
PROCESS FOR REMOVAL OF THE CATALYTIC COATING MATERIAL FROM SPENT, DEFECTIVE OR UNUSED METAL SUPPORT CATALYTIC CONVERTERS
