(B2) ;DENKAIHOSHUTSUSOSHIOYOBISONOSEIZOHOHO

摘要

PURPOSE:To efficiently manufacture a field emission (FEC) which has a resistance layer independent for every emitter. CONSTITUTION:(a) A cathode conductor 2, an insulation layer 3 and a gate 4 are laminated on an insulating substrate 1 to form a cavity 5 in the insulation layer 3 and the gate 4. (b) Si is evaporated to the insulating substrate 1 from a vertical direction to from a Si layer on the gate 4 and an independent resistance layer 7 on the cathode conductor 2 in the cavity 5. (c) The Si layer 6 is only oxidized with anode oxidation to form a peeled layer 8. Mo is evaporated to the insulating substrate 1 from a vertical direction to form an emitter 9 on the resistance layer 7. (d) The peeled layer 8 and an unnecessary layer 10 on the peeled layer 8 are removed to obtain a field emission component(FEC) which has the resistance layer 7 independent for every emitter 9.