发明名称 |
PROCEDE DE PRODUCTION DE VAPEUR SATUREE DE COMPOSES ORGANO-METALLIQUES SOLIDES DANS LE CADRE DU PROCEDE DE METALLISATION DE COMPOSES ORGANO-METALLIQUES EN PHASE VAPEUR |
摘要 |
<p>A method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method is disclosed, which is characterized in that, into a cylinder for metal organic chemical vapor deposition having a structure that an introducing port and a discharging port of carrier gas are provided respectively to the cylinder for metal organic chemical vapor deposition and a tube directly connected to either of these is inserted into the cylinder, a solid metal organic compound and a packing material are charged and a carrier gas fed from introducing port into cylinder is discharged from discharging port to outside of cylinder.</p> |
申请公布号 |
FR2635792(B1) |
申请公布日期 |
1993.11.12 |
申请号 |
FR19890011209 |
申请日期 |
1989.08.24 |
申请人 |
TOSOH AKZO CORP |
发明人 |
AKIRA YAMANE;MASAO FUJISAWA |
分类号 |
C23C16/44;C23C16/448;C30B25/14;C30B25/16;C30B29/40;(IPC1-7):C30B25/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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