| 摘要 |
An apparatus is described for the removal of impurity gases such as O2, CH4, CO, CO2 and H2 from impure inert gases such as rare gases and N2. The apparatus comprises an impure inert gas inlet, a housing containing first and second gas sorbing materials and a purified gas outlet. The first gas sorbing material may be a Zr-V-Fe getter alloy if the gas to be purified is a rare gas, whereas it may be a Zr-Fe alloy if the gas to be purified is N2. The second gas sorbing material is a Zr-Al alloy which ensures that the purified inert gas has an extremely low level of hydrogen. A process for the removal of impurity gases from inert gases and ensuring an extremely low level of hydrogen in the purified gas is also described. |
