| 摘要 |
PURPOSE:To enhance the energy efficiency and purity by housing an induction heating high frequency coil and a graphite heater in a specific vessel and furnishing a gas discharge and supply pipes. CONSTITUTION:In the vacuum vessel in which the gas discharge pipe 1 and the gas supply pipe 8 are furnished and which is resistant to 10-4Torr vacuum at a graphitizing temp., the induction heating high frequency coil 5 and a heated carbon material 4 are housed and the graphite heater 6 is provided between the coil 5 and the carbon material 4. Hence, since a high purification reaction is performed in the vacuum vessel, the consumption of gaseous halogen is little and shortening of the high purification processing hour is allowed, thus a more higher purity of graphite is obtained. |
