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发明名称
摘要
申请公布号
JPH0580148(B2)
申请公布日期
1993.11.08
申请号
JP19890268544
申请日期
1989.10.16
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
BABA YOSHIAKI;ETSUNO YUTAKA;OOSAWA AKIHIKO;YANAGYA SATOSHI
分类号
H01L21/76;H01L21/762;H01L21/763;(IPC1-7):H01L21/76
主分类号
H01L21/76
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