发明名称 |
Micromachined sensor device |
摘要 |
In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived. |
申请公布号 |
AU3752393(A) |
申请公布日期 |
1993.11.08 |
申请号 |
AU19930037523 |
申请日期 |
1993.03.24 |
申请人 |
SHELL INTERNATIONALE RESEARCH MAATSCHAPPIJ B.V. |
发明人 |
BINDERT SJOERD DOUMA;PETER EIGENRAAM |
分类号 |
G01L1/10;G01L9/00 |
主分类号 |
G01L1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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