| 摘要 |
PURPOSE:To obtain a semiconductor acceleration sensor devised for reduction of the cost and miniaturization. CONSTITUTION:In a semiconductor acceleration sensor having a strain-sensitive resistor bridge constructed by combining strain-sensitive gage resistors formed on a silicon substrate, resistors r1, r2, r3 and r4 for compensation connected onto the power source connection terminal sides of the strain-sensitive gage resistors Rz3 and Rz4 out of Rz1 to Rz4 are formed on the substrate simultaneously with the strain-sensitive gage resistors, and a bridge is constructed at the time of assembly by selecting the necessary resistors for compensation and connecting them together by a bonding wire 51, so that zero-point offset compensation of the strain-sensitive resistor bridge be conducted. |
