| 摘要 |
An X-Y table apparatus provided with a base (12), a member (14) capable of being moved in an X-direction with respect to the base, a member (18) capable of being moved in a Y-direction with respect to the X-direction-movable member and supporting an object placed thereon, and a means (20) for detecting an amount of movement of the object support member with respect to the base, the movement amount detecting means including a main scale (24) which is provided at the central portion of a lower surface of the object support member so that the main scale can be operated in accordance with the movement of the object support member, and which has a matrix type island-like first lattice, and an index scale (26) which is provided on the base so that it can be moved relatively and two dimensionally with respect to and extends in parallel with the main scale, and which has a second grid-ironed lattice (80) and a third grid-ironed lattice (82). This apparatus has a simple construction, and, moreover, it is capable of detecting the displacement of an object in the X- and Y-directions with a high accuracy. A block (100) attached unitarily to the object support member (18) is provided with a mounting hole (101). A free end portion (102) of a detecting shaft (22) of an X-Y encoder is inserted into this mounting hole and three-line-supported on three parallel pins (103a-103c). The relative position of angle of rotation of a table with respect to the X-Y encoder are finely regulated by turning the detecting shaft by a regulating lever (105) directly under the object support member. |
