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发明名称
X-ray source.
摘要
申请公布号
EP0244504(B1)
申请公布日期
1993.10.27
申请号
EP19860111572
申请日期
1986.08.21
申请人
SHIMADZU CORPORATION
发明人
SOEZIMA, HIROYOSHI
分类号
G21K1/00;G03F7/20;G21K1/06;G21K5/08;G21K7/00;H01J35/00;H01J35/04;H01J35/08;H01L21/027;H05G1/00;(IPC1-7):H01J35/00
主分类号
G21K1/00
代理机构
代理人
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