| 发明名称 |
Integral semiconductor wafer map recording |
| 摘要 |
A method for integral semiconductor wafer map recording which comprises a semiconductor wafer (11) having a plurality of individual die (12, 13) thereon. Testing each of the individual die (12). Summarizing the results of the testing in a wafer map. Recording the wafer map on the semiconductor wafer (11) by laser scribing a binary code (19) within inactive die (13).
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| 申请公布号 |
US5256578(A) |
申请公布日期 |
1993.10.26 |
| 申请号 |
US19910812344 |
申请日期 |
1991.12.23 |
| 申请人 |
MOTOROLA, INC. |
发明人 |
CORLEY, DEAN;LITTLEBURY, HUGH W. |
| 分类号 |
H01L21/02;H01L21/66;H01L23/544;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/02 |
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