JIG FOR DETECTING DEVIATION BETWEEN ROTATION CENTER AND THERMAL CENTER OF SINGLE CRYSTAL-LIFTING OVEN AND METHOD FOR DETECTION AND PRODUCTION OF SINGLE CRYSTAL,申请号JP19920080922-传众专利搜索

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发明名称	JIG FOR DETECTING DEVIATION BETWEEN ROTATION CENTER AND THERMAL CENTER OF SINGLE CRYSTAL-LIFTING OVEN AND METHOD FOR DETECTION AND PRODUCTION OF SINGLE CRYSTAL
摘要
申请公布号	JPH05279173(A)	申请公布日期	1993.10.26
申请号	JP19920080922	申请日期	1992.04.02
申请人		发明人
分类号	C30B15/20;H01L21/208;(IPC1-7):C30B15/20	主分类号	C30B15/20
代理机构		代理人
主权项
地址

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