| 摘要 |
<p>PURPOSE:To stably produce product gas of a prescribed concentration and to lower the power consumption even in the reduced operating state by increasing or decreasing the quantity of purge gas introduced into an adsorber where vacuum regeneration is performed corresponding to the degree of the decrease in the product gas. CONSTITUTION:In a PSA device 1 having three adsorbers 2a-2c, the 1st adsorber 2a, the 2nd adsorber 2b and the 3rd adsorber 2c undergo an adsorption process, a pressure charging process and a regenerating process respectively and these adsorption, pressure charging and regenerating processes are switched to each other in order. The quantity of product gas is detected by a flowmeter and inputted to an arithmetic unit to calculate the quantity of purge gas to the adsorber where vacuum regeneration is performed corresponding to the product quantity and the degree of opening of a flow control valve is adjusted to output it. Thus, in the reduced operation, the recovery of product is lowered with the same cycle time as in the normal operation to make it correspond to the product quantity.</p> |
