| 摘要 |
PURPOSE:To provide the produce formed by using the film formed by vapor deposition of metal or ceramics on a porous fluororesin film and the method for vapor deposition of the metal or ceramics which improves the adhesion of strength and homogeneously deposits the metal or ceramics. CONSTITUTION:A circuit board, substrate for antennas, antimicrobial film, film for fabrics, film for current collector, film for electromagnetic shielding, film for corrosion resistant electrodes, electrode film for gas sensor, water leakage sensor and static electricity removing air filter, which are formed by vapor deposition of the metal on the porous fluororesin film, are formed and an electronic circuit board and hydrophilic filter, which are deposited with the ceramics by evaporation, are formed. The metal or ceramics is deposited by evaporation from at least >=2 points of vapor deposition sources and the film and the source of vapor deposition is relatively removed, by which, the vapor deposition is executed in a vacuum of <=1X10<-3> Torr intra-system pressure by confining the length of the vapor deposition sources to <=1/5 the width of the porous fluororesin film. |
