| 摘要 |
<p>PURPOSE:To provide a module to be attached to a cassette or container, which has no projections interfering with automatic cleaning, can undergo data updating without removal from the container, can be transported integrally with the container, and can store a large amount of data. CONSTITUTION:IC modules 30A and 30B, each having a transmitter-receiver and a programmable memory, are provided on members 10 and 15 of a wafer container that is transported from one stage to another in a semiconductor manufacturing system. A stationary radio station 20 is provided for bidirectional communication with the IC modules. The IC modules are powered by the energy derived from the received radio waves.</p> |
