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发明名称
(B2) ;HANDOTAISEIZOSOCHI
摘要
申请公布号
JPH05275347(A)
申请公布日期
1993.10.22
申请号
JP19920101864
申请日期
1992.03.27
申请人
发明人
分类号
H01L21/205;H01L21/203;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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