| 摘要 |
PURPOSE:To provide a compact light projecting optical system with a high detecting capability at a low cost by correcting the circular scanning in the width direction on the inspection face near the linear scanning in a defect inspecting device slantly radiating a laser beam to the surface of a specimen and detecting a defect on the surface with the reflected light. CONSTITUTION:When a laser beam is radiated to the surface of a specimen 1 being conveyed with a rotary polygon mirror 7 via a flying spot system to inspect the defect of the specimen 1, the laser beam is fed in the slant direction at a fixed angle against the rotary polygon mirror 7, thus the scanning line of the laser beam on the surface of the specimen 1 is corrected to nearly a straight line. |
