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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH05275381(A)
申请公布日期
1993.10.22
申请号
JP19920100498
申请日期
1992.03.25
申请人
发明人
分类号
C23F4/00;G01N24/14;G01R33/64;H01L21/302;H01L21/3065;H01L21/31;H01P7/06;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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