发明名称 Stimmgabel-Quarz-Manometer.
摘要 In the present pressure measurement process the damping signal of a tuning fork quartz manometer, which is a measure of the prevailing pressure, is so combined with the correction value proportional to the resonant frequency that a measurement result is obtained, which is independent of any contamination of the tuning fork quartz. Apart from the resonant frequency (fR) of the measuring quartz (11), preferably also the resonant frequency (fR') of a reference quartz (21) kept at constant pressure is determined. Thus, the damping signal (RS) can be corrected by a correction value proportional to the difference between the two reference frequencies (RR'-fR), which is substantially temperature-independent.
申请公布号 DE58905633(D1) 申请公布日期 1993.10.21
申请号 DE1989505633 申请日期 1989.12.08
申请人 BALZERS AG, BALZERS, LI 发明人 STOCKER, RUDOLF, DR., CH-9478 AZMOOS, CH
分类号 G01L9/00;G01L19/04;G01L21/22;H03H3/04;(IPC1-7):G01L21/22 主分类号 G01L9/00
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