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经营范围
发明名称
SYSTEM FOR DRYETCHING DOPED WITH LOCAL TRACE GAS
摘要
申请公布号
JPH05267231(A)
申请公布日期
1993.10.15
申请号
JP19920065745
申请日期
1992.03.24
申请人
发明人
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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