| 摘要 |
<p>A mirror driving apparatus which includes a rotary mirror (1), a support member for rotatably supporting the rotary mirror (1), a driving section for rotating the rotary mirror (1), a rotary electrode (17) mounted on the rotary mirror (1) or the support member, a fixed electrode (16) disposed close to the rotary electrode (17) through a small clearance generally in parallel relation therewith, a fixing section for fixing the support member and the fixed electrode (16), a detecting section for detecting electrostatic capacity or variation thereof between the rotary electrode (17) and the fixed electrode (16). By detecting the displacing amount of the rotary mirror at high sensitivity as variation of capacity between the electrodes, electrical control is applied to the mechanical vibration system including the rotary mirror and the rotary mirror support member so as to suppress resonance value at the rotary mirror initial resonance frequency. Additionally, by superposing an additional high frequency component outside the control band onto the rotary mirror control signal, the rotary mirror is subjected to fine movement at all times, and thus, a dead band region (hysteresis characteristic) of the mechanical vibration system including the rotary mirror and its support member is reduced and uniformly maintained. <IMAGE></p> |
