发明名称 |
Conical rapid thermal processing apparatus |
摘要 |
A conical rapid thermal processing system includes a conical thermal radiation reflector and a plurality of elongated radiant heating sources within the conical thermal radiation reflector. The elongated radiant heating sources pass through an imaginary conical surface within the conical thermal radiation reflector. A wafer holder within the imaginary conical surface holds the wafer face transverse to the common axis of the conical reflector and the conically arranged radiant heating lamps. The conical thermal radiation reflector and conically arranged lamps provide uniform radiant heating across the face of a wafer without significantly degrading coupling efficiency.
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申请公布号 |
US5253324(A) |
申请公布日期 |
1993.10.12 |
申请号 |
US19920953568 |
申请日期 |
1992.09.29 |
申请人 |
NORTH CAROLINA STATE UNIVERSITY |
发明人 |
WORTMAN, JIMMIE J.;SORRELL, FURMAN Y.;HAUSER, JOHN R.;FORDHAM, MARK J. |
分类号 |
C30B31/12;F26B3/28;H01L21/00;(IPC1-7):A21B2/00;F26B3/30;F27B9/04;F27B9/06 |
主分类号 |
C30B31/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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