Apparatus and method for selectively etching a plastic encapsulating material

摘要

A method and apparatus for selectively spray etching an epoxy encapsulated chip which is mounted to a chip carrier without damage to the chip, the chip carrier or other closely mounted chips. The apparatus includes a diaphragm which can be raised and lowered to direct the flow of etchant solution at the encapsulating material located alongside and under the chip. The encapsulating material is removed from the chip without removing the chip from the chip carrier.