| 摘要 |
PURPOSE:To obtain a method and a device for detecting the peak position and the background position of characteristic X rays in EPMA, etc., more accurately. CONSTITUTION:An obtained intensity distribution data are smoothed A to obtain a secondary differential curve B of the curve A. Then, the position is judged to be a peak position when there is only one minus minimum value point of the curve B, a minimum value position closest to a theoretical peak position d is judged to be the peak position when there are two or more minimum value points of the curve B, and then the theoretical peak position d is judged to be the peak position when there are no extreme values of the curve B. When there are no maximum values of secondary differential value between the theoretical peak position d and a position which is ahead of or behind it by a certain distance, a position which is away from the theoretical peak position d by a certain distance is judged to be a background position e. On the other hand, when there is the maximum value of secondary differential value between them, the minimum value position or the curve A corresponding to the maximum value is judged to be a background position f. |
