THIN FILM FORMING METHOD,申请号JP19920058711-传众专利搜索

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发明名称	THIN FILM FORMING METHOD
摘要
申请公布号	JPH05263226(A)	申请公布日期	1993.10.12
申请号	JP19920058711	申请日期	1992.03.17
申请人		发明人
分类号	C23C14/18;C23C14/34;H01L21/203;H01L21/28;H01L21/285;(IPC1-7):C23C14/34	主分类号	C23C14/18
代理机构		代理人
主权项
地址

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