OPERATING METHOD FOR ION IRRADIATION DEVICE,申请号JP19920089364-传众专利搜索

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发明名称	OPERATING METHOD FOR ION IRRADIATION DEVICE
摘要
申请公布号	JPH05258708(A)	申请公布日期	1993.10.08
申请号	JP19920089364	申请日期	1992.03.12
申请人		发明人
分类号	G21K5/04;C23C14/48;H01J37/317;H01L21/265;(IPC1-7):H01J37/317	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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