Flow measurement device with mechanically resonant structure - contains flexible element whose torsion is measured via magnetostrictive film permeability changes

摘要

An electrical signal is produced dependent on the deflection of a structure according to the flow of a liquid or gas. The structure contains a flexible element (3) mounted at both ends which twists under the acting force. The element carries a thin magnetostrictive sensor film (8) of weakly magnetic material with characteristic magnetostriction and defined anisotropy field strength. The change in the permeability of the film associated with the torsion in the flexible element is measured. USE/ADVANTAGE - Has compact structure which overcomes e.g. sealing and thermal effects.