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发明名称
MANUFACTURE OF SEMICONDUCTOR PRESSURE SENSOR
摘要
申请公布号
JPH05251714(A)
申请公布日期
1993.09.28
申请号
JP19920048640
申请日期
1992.03.05
申请人
OKI ELECTRIC IND CO LTD
发明人
KATO TAKAO
分类号
G01L9/04;G01L9/00;H01L29/84;(IPC1-7):H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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