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发明名称
CELL ARRANGING SYSTEM
摘要
申请公布号
JPH05250439(A)
申请公布日期
1993.09.28
申请号
JP19920044709
申请日期
1992.03.02
申请人
NEC CORP
发明人
WAKUI KAZUO;IMAHASHI MASAHIKO
分类号
H01L21/82;G06F17/50;(IPC1-7):G06F15/60
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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